JPH0314055Y2 - - Google Patents

Info

Publication number
JPH0314055Y2
JPH0314055Y2 JP1984159637U JP15963784U JPH0314055Y2 JP H0314055 Y2 JPH0314055 Y2 JP H0314055Y2 JP 1984159637 U JP1984159637 U JP 1984159637U JP 15963784 U JP15963784 U JP 15963784U JP H0314055 Y2 JPH0314055 Y2 JP H0314055Y2
Authority
JP
Japan
Prior art keywords
bimorph
shim
displacement
deflection
piezoelectric elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984159637U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6175148U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984159637U priority Critical patent/JPH0314055Y2/ja
Publication of JPS6175148U publication Critical patent/JPS6175148U/ja
Application granted granted Critical
Publication of JPH0314055Y2 publication Critical patent/JPH0314055Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP1984159637U 1984-10-22 1984-10-22 Expired JPH0314055Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984159637U JPH0314055Y2 (en]) 1984-10-22 1984-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984159637U JPH0314055Y2 (en]) 1984-10-22 1984-10-22

Publications (2)

Publication Number Publication Date
JPS6175148U JPS6175148U (en]) 1986-05-21
JPH0314055Y2 true JPH0314055Y2 (en]) 1991-03-28

Family

ID=30717588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984159637U Expired JPH0314055Y2 (en]) 1984-10-22 1984-10-22

Country Status (1)

Country Link
JP (1) JPH0314055Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4427665B2 (ja) * 2004-07-28 2010-03-10 国立大学法人広島大学 曲げ変形センサおよび変形測定装置
JP6586686B2 (ja) * 2014-07-30 2019-10-09 国立大学法人福井大学 高分子アクチュエーターの制御方法、高分子アクチュエーター及びこの高分子アクチュエーターを利用した微少流体送出装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919384A (ja) * 1982-07-23 1984-01-31 Omron Tateisi Electronics Co 圧電バイモルフ

Also Published As

Publication number Publication date
JPS6175148U (en]) 1986-05-21

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